Compliant with SEMI, ASME BPE, ISO 286; RoHS/REACH test reports available.
Standard: ≥500K cycles (±10% stroke); Reinforced: ≥1M cycles.
Yes, compliant with ASTM E595 outgassing, particles ≤ISO Class 4.
Dedicated adapters (with seals) for 20+ combinations like CF-KF/CF-ISO.
Machine polish (Ra0.8μm), Electropolish (Ra0.4μm), Passivation (anti-oxidation).
Standard: 10⁻⁶ Pa~10⁵ Pa, -20℃~150℃; High-temp version: up to 450℃.
Diameter: 16-500mm; Length: 50-1000mm (customizable).
KF/ISO: ≤10⁻⁸ Pa·m³/s; CF: ≤10⁻¹⁰ Pa·m³/s (helium leak tested).
Standard: 304/316L stainless steel. Options: Aluminum (lightweight), Titanium (corrosion-resistant), Copper (high thermal conductivity).
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Quick response within 24h
Quality assurance
Accessory replacement
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