What international standards do your products meet?

Compliant with SEMI, ASME BPE, ISO 286; RoHS/REACH test reports available.

What is the lifespan of vacuum bellows?

 

Standard: ≥500K cycles (±10% stroke); Reinforced: ≥1M cycles.

Do your products meet semiconductor cleanliness standards?

 

Yes, compliant with ASTM E595 outgassing, particles ≤ISO Class 4.

How to adapt between flange standards (e.g., CF to KF)?

Dedicated adapters (with seals) for 20+ combinations like CF-KF/CF-ISO.

What surface finishes are available for vacuum chambers?

Machine polish (Ra0.8μm), Electropolish (Ra0.4μm), Passivation (anti-oxidation).

What are the pressure/temperature limits of vacuum valves?

Standard: 10⁻⁶ Pa~10⁵ Pa, -20℃~150℃; High-temp version: up to 450℃.

What are the size ranges for vacuum bellows?

 

Diameter: 16-500mm; Length: 50-1000mm (customizable).

What are the leak rates for different flange types?

 

 

KF/ISO: ≤10⁻⁸ Pa·m³/s; CF: ≤10⁻¹⁰ Pa·m³/s (helium leak tested).

What materials are used for vacuum flanges?

 

Standard: 304/316L stainless steel. Options: Aluminum (lightweight), Titanium (corrosion-resistant), Copper (high thermal conductivity).

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