We offer tailored water-cooling solutions for various chamber types. Our methods cater to both flat and cylindrical chambers and are continually refined to ensure optimal performance and reliability.
|
Temperature |
-26˚C to 200˚C |
|
Working Pressure |
Vacuum~atmosphere pressure |
|
Helium Leak Test |
1×10 -9 Pa・m³/sec or less |
|
Temperature |
-26˚C to 200˚C |
|
Working Pressure |
Vacuum~atmosphere pressure |
|
Helium Leak Test |
1×10 -9 Pa・m³/sec or less |
|
Temperature |
-26˚C to 200˚C |
|
Working Pressure |
Vacuum~atmosphere pressure |
|
Helium Leak Test |
1×10 -9 Pa・m³/sec or less |
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Accessory replacement
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